The New York University (NYU) Nanofabrication Cleanroom has formally partnered with Oxford Instruments to install the PlasmaPro ASP atomic layer deposition (ALD) equipment, marking a significant milestone for the American quantum technology environment. With this partnership, the NYU center becomes the first location in the country to use this new plasma processing technology exclusively for superconducting quantum applications, marking a significant technological “first” for the country. The installation is a significant advancement in the quest for atomic-scale high-precision manufacturing, which is necessary for the next generation of quantum devices.
You can also read New York University News: $1M Grant for Quantum Research
A Technical Leap in Quantum Settlement
The PlasmaPro ASP ALD system, a device carefully created to satisfy the demanding requirements of creating superconducting oxides, is at the center of this collaboration. These materials use as fundamental building blocks for the development of communications, sensing, and quantum computing technology. The PlasmaPro ASP’s unique efficiency is one of its main benefits; it provides deposition rates that are three times quicker than those of current alternative technologies.
The Science of Nitride Superconductors
Significant scientific findings spearheaded by NYU and published in Applied Physics Letters in November 2025 served as the drive for installing this particular system. Tantalum carbonitride (TaC?N???) was found to be a superconducting material with excellent properties for the creation of quantum devices. In particular, the material has a broad superconducting gap, high dynamic inductance, and low microwave loss.
Thin-film nitride superconductors offer a number of “key advantages” over the traditional materials commonly employed in quantum platforms, according to Dr. Matthew LaHaye, who directed the Air Force Research Laboratory’s (AFRL) participation in this study. These nitrides make quantum systems more resilient, allowing them to function at greater temperatures and remain stable in the presence of light and magnetic fields conditions that are often harmful to quantum coherence. According to Dr. LaHaye, the capacity to consistently structure these excellent films may then reduce the operational expenses of quantum systems and make their integration with other technological platforms easier.
You can also read Stony Brook University News In New York’s $8.93B Innovation
Strategic Collaboration with the CHIPS Act
The NORDTECH hub of the U.S. Microelectronics Commons provided funding for the purchase of the PlasmaPro ASP. The CHIPS and Science Act, a significant part of rules passed into law in 2022 to improve the United States’ standing in microelectronics research and workforce development.
As a facility for academic testing, the NYU Nanofab is essential to this ecosystem. Its main goal is to support the “Lab-to-Fab” mission, which aims to close the gap between basic laboratory research and the scalable production procedures needed for commercial business. This capability is a “natural progression” for the facility, according to Davood Shahrjerdi, Director of the NYU Nanofab and Professor of Electrical and Computer Engineering at NYU Tandon. He said that by overcoming current hardware constraints, the new approach will make it possible to create completely new materials and device architectures.
You can also read GSV News unveils $88M fund to accelerate Quantum Technology
Institutional Impact and History
NYU Nanofab on the Tandon Brooklyn campus reached capacity in 2023. The first academic cleaning in Brooklyn provides new expertise to scholars who seek to apply fresh theoretical ideas. The facility allows the development of complex semiconductor electronics and bioelectronic sensors in addition to quantum circuits.
NYU School of Civil Engineering and Architecture and the Brooklyn Collegiate and Polytechnic Institute in 1854, the NYU Tandon School of Engineering itself has a full history. The university now addresses worldwide issues in robotics, expressed intelligence, sustainability, and health.
Oxford Instruments, a FTSE250 innovator, partners with NYU. Established in 1959 as Oxford University’s first technology company, the business has developed into a significant supplier of scientific technology for the semiconductor, materials analysis, and healthcare industries. Oxford Instruments seeks to serve as a “catalyst” for advancements in the real world by bridge the gap between the practical requirements of commercial application engineers and the discoveries of academic researchers.
Installing the PlasmaPro ASP will “accelerate the development of advanced semiconductor and quantum devices,” Oxford Instruments Plasma Technology Head of Strategic R&D Markets Dr. Harriet van der Vliet said. She highlighted the company’s effort to helping the “next generation of researchers” by strengthening its relationship with NYU.
Looking Toward a Quantum Future
The Oxford Instruments-NYU Nanofab partnership is a model for academic and commercial technology companies to collaborate as the US pursues its quantum revolution lead. This alliance is setting the groundwork for a new computing and sensing period by giving researchers the tools to efficiently alter matter at the atomic scale. The U.S. microelectronics industry’s future depends on its capacity to consistently create these next-generation materials at large scale.
You can also read Stony Brook University US News: Drives US Quantum Strategy
