The “Lab-to-Fab” Moment in Quantum Computing: Imec Reveals the World’s First Qubit Device Constructed with High NA EUV
At this week’s ITF World conference, IMEC, the world’s top semiconductor technology research and innovation hub, reveled a historic “world first” first quantum dot qubit device using High NA EUV lithography. High NA EUV (Extreme Ultraviolet) lithography was successfully used by the research center to produce a quantum dot qubit device, which is thought to be the first integrated hardware device ever made utilizing this next-generation lithography method.
The field of quantum computing has long struggled to advance from small-scale lab research to large-scale production. IMEC’s achievement, which transitions from individual demonstration devices to 300mm fab-compatible, repeatable quantum bits, significantly changes this focus. This research is crucial because a really efficient quantum computer that can address complex problems like drug discovery or physical process simulations would need to scale to millions of connected qubits with exceptional reliability and precision.
You can also read Western Digital Launches PQC-Ready Ultrastar UltraSMR HDDs
High NA EUV’s Function: Going Beyond Conventional Silicon
High NA EUV lithography has been considered the important component of the next generation of classical computing, especially for high-density memory and sub-2nm logic technologies to improve artificial intelligence and high-performance computing. But IMEC’s most recent demonstration shows that this technique is just as important for quantum hardware in the future.
The primary challenge with quantum dot qubits is the need for extremely accurate patterning. “High NA EUV enables the precise patterning of silicon quantum dot qubits,” said Kristiaan De Greve, director of the Quantum Computing program and an IMEC fellow. The physics of these devices states that the coupling strength between neighboring quantum dots increases linearly as the distance between them decreases. Engineers must consistently create gaps of only a few nanometers between the control electrodes to ensure functional functioning; Imec refers to this challenge as a “true engineering feat” made achievable by cooperation with ASML and their High NA EUV technology.
Why “Industry Qubits”?
Among the several platforms now competing for dominance in the quantum domain, silicon quantum dot spin qubits are commonly referred to as “the industry qubits.” Their primary advantage is their compatibility with the standard CMOS (Complementary Metal-Oxide-Semiconductor) production processes used for modern computer chips.
By using silicon-based qubits, researchers can use decades of advancements in semiconductors and reuse the whole ecosystem designed for silicon scaling. This enables quantum devices to advance “beyond lab experiments to large-scale, manufacturable systems,” according to Sofie Beyne, project leader and quantum integration engineer at imec.
These devices store quantum information in the “spin state” of an electron that is trapped inside a silicon nanostructure. A key challenge to quantum stability is ambient noise, which must be minimized by keeping the intervals between gates as small as possible. Imec’s achievement includes a functional network of qubits with gaps as small as 6 nanometers. Considering their small size, it is possible to incorporate millions of these quantum bits onto a single device.
You can also read TAS Thales Alenia Space Tests 140km Quantum Bridge in Canary
A Proven Foundation for Scaling
The successful study at IMEC, which had previously shown that CMOS-compatible technologies could achieve continuous qubit operation and decreased charge noise, is extended by this most recent demonstration. By incorporating High NA EUV into the pipeline, IMEC is addressing the long-standing “upscaling” problem in quantum research.
The initiative is a part of IMEC’s larger quantum research ecosystem, which also includes partnerships with industry partners like Diraq to close the gap to utility-scale quantum computing and the EU-funded “SPINS” pilot line. The infrastructure required to regulate and read out these delicate quantum states is further supported by Imec’s proficiency in CMOS and photonics-based sensing.
You can also read BTQ Technologies Q1 2026 Update and Commercial Progress
Effects on the Worldwide Value Chain
Over 6,500 workers and an extensive R&D infrastructure support Imec’s activity as a center for the semiconductor value chain. The company recorded €1.2 billion in sales in 2025, demonstrating its key role in promoting innovation in the telecommunications, healthcare, and automotive industries.
The performance of this High NA EUV qubit device informs the global market that the hardware requirements for large-scale quantum computers may be closer to traditional semiconductor manufacturing than previously thought. IMEC is establishing silicon spin qubits as the leading candidate for the ultimate commercialization of quantum technology by employing the lithography methods currently in use.
The ability to create integrated qubit circuitry on 300mm wafers using the same methods that will create the next generation of AI chips is a clear turning point in the quest for a working quantum computer, even though a million-qubit processor is still a long way off.
